DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.
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Updated
Apr 11, 2023 - MATLAB
DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.
Chamber-to-feature ALD digital twin: OpenFOAM showerhead reactor with Langmuir/patterned-wafer wall kinetics, Knudsen feature model, PillarHall validation, JMP DOE and MATLAB GP uncertainty
The four HTML applets are part of the dissertation "Parallelized Approaches to Conformal Mappings with applications to real-time calligraphy" of Lena Polke at the Technical University of Munich. The code is written in CindyJS.
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